Mobile Road Lock System "CEX-2420"
Equipped with two connection ports for sputtering devices and PLD devices! Samples can be transferred to each sample holder.
The "CEX-2420" is a mobile load lock system that allows the transfer of film samples between the combinatorial sputtering device "CMS-6420" and the Pascal-made "PLD device" under ultra-high vacuum without atmospheric exposure. The L/L chamber and the connection ports are evacuated by independent turbo molecular pumps, keeping the samples in ultra-high vacuum at all times. It is equipped with two connection ports for the sputtering device and the PLD device, enabling the transfer of samples to each sample holder. It is backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages. 【Features】 ■ Enables the transfer of film samples under ultra-high vacuum without atmospheric exposure ■ Equipped with two connection ports for the sputtering device and the PLD device, allowing for sample transfer to each sample holder ■ Backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages *For more details, please refer to the PDF document or feel free to contact us.
- 企業：コメット
- 価格：Other
